Training
For training, please contact the Tool Manager(s).
Compatibility:
Additional Restrictions
- No low-temperature materials (unstable below 500C)
- No High-Vapor-Pressure Materials
Manager
Body
The YES PB8 is a high temperature vacuum oven using a programmable temperature controller and programmed vacuum and nitrogen flow cycles for curing of polyimide, SU8, BCB, and other films. The unit features filtered heated nitrogen purging the chamber in a laminar flow and acting to clean the wafers during the process.
Capabilities
- Capacity: Up to two boats of 8-inch wafers
- Ramp: 1-5°C/min
- Cool-down: 1-5°C/min
- Max Temperature: 450°C
- Idle Temperature: 50°C
- Non-toxic and Non-flammable gases/materials only