SubTitle
Acid/Base Fume Hoods for General Wet Chemistry Steps
Training
For training, please contact the Tool Manager(s). You will first be required to watch the training videos (~35 minutes). Then, there is a hands on training (~ 1 hour). The training videos are available in CU Learn as course RSRCH - CNF CHEM101 - General Chemistry Area Training
Compatibility:
Additional Restrictions
Manager
Backups:
Body
The CNF has a variety of fume hoods for wet processing of samples. Hoods are available for acid and base/solvent processing. Spin Rinse Dryers (SRD) are available at most hoods for drying wafers after processing.
Measurements of the etch rates for common etchants is available below.
Processes Available
- DI Water
- N2 blow off guns
- Spin Rinse Dryers
- Hotplates with Teflon thermocouples for closed-loop temperature control