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Seki Diamond CVD

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Tool Location
114
Training

For training, please contact the Tool Manager(s).

Compatibility:
1 - Restricted Silicon Based Materials Only
Manager
Phil Infante
Body

Seki Diamond CVD tool for depositing CVD polycrystalline and crystalline diamond for Quantum applications on 2" substrates.

Equipment Information Sheet

Please acknowledge the CNF in your presentations, posters, and publications.

This material is based upon work supported by the National Science Foundation under Grant No. NNCI-2025233. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.

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