Tool Location
107

For training, please contact the Tool Manager(s).

Compatibility:
5 - Class A and B Metals and Compounds
Manager
Phil Infante
Xallent Nanoprobe

Sheet resistance, resistivity, and IV-curve measurement tool compatible with up to 100mm wafers. By utilizing Xallent's fine pitch (10um) four point probes, it is capable of investigating how grain size/boundaries, defects, and material composition impact sheet resistance and resistivity.

Equipment Information Sheet