No formal training is required. For questions please contact the tool manager.
- Do not use wipes, which generate particles, on microscope stages. Place samples on microscope slides.
The Olympus BX60/U-CFU microscope employs a slit method scanning disk that blocks defocused reflected light from samples and allows only focused light to go through. It generates clear and high resolving images with 0.18-micron compatibility. A mercury lamp house is the standard light source, which provides a bright, clear image. The U-CFU has excellent Z-axis (vertical) detection. A layer in a multi-layer wafer can be observed distinguishably through this capability.