Tanks for hot Phosphoric acid
Tool Location
103

For training, please contact the Tool Manager(s).

Training is by small group classes scheduled as required and takes about 30 minutes.

Compatibility:
1E - Silicon Based Materials and Select Dieletrics
Additional Restrictions
  • Silicon nitride etching only - no metal etching
  • Teflon boats only!
Manager
Phil Infante
Backups:
Christopher Alpha
NanoStrip Hood

Hot Phosphoric Acid - Boiling phosphoric acid is used for etching silicon nitride selectively to silicon oxide. The tank is specifically designed for nitride etching with a controller that can maintain the phosphoric acid boiling point to within 0.5°C. This setup is for electronic grade substrates only.

 

Capabilities
  • Hot phosphoric acid
Equipment Information Sheet