SubTitle
Tank for Nanostrip etching of wafers
Training
No training is required beyond the normal general chemistry training. Follow the directions at the tank.
Compatibility:
Additional Restrictions
- No waxes or other thick organic films. If you are uncertain, check with staff before stripping substrates.
- Teflon boats only!
Manager
Backups:
Capabilities
Nanostrip - Nanostrip is a more stable version of the commonly known pirhana etch (Sulfuric Acid / Hydrogen Peroxide) and is used to remove residual organics.
Processes Available
- Hot sulfuric acid