PlasmaTherm720/740 is a dual chamber RIE system with both chlorine and fluorine based chemistry.
For training, please contact the Tool Manager(s).
- Use sapphire carrier wafer for pieces
- The PT720/740 is a class 5 category tool with few materials restrictions.
The 720/740 is a dual chamber loadlocked system RIE system with very few materials restrictions. Exposed gold is allowed in this chamber.
- Chlorine based and fluorine based gases are available.
- Load locked sample introduction
- Up to 8 inch wafer capability
- Turbomolecular pumping
- exposed gold is allowed in this chamber.