PlasmaTherm720/740 is a dual chamber RIE system with both chlorine and fluorine based chemistry.

For training, please contact the Tool Manager(s).

Compatibility:
5 - Class A and B Metals and Compounds
Additional Restrictions
  • Use sapphire carrier wafer for pieces
  • The PT720/740 is a class 5 category tool with few materials restrictions.
Manager
Mac McMurdy
Backups:
Jeremy Clark
PT 720/740

The 720/740 is a dual chamber loadlocked system RIE system with very few materials restrictions.  Exposed gold is allowed in this chamber.

Capabilities
  • Chlorine based and fluorine based gases are available.
  • Load locked sample introduction
  • Up to 8 inch wafer capability
  • Turbomolecular pumping
  • exposed gold is allowed in this chamber.
Equipment Information Sheet
Resources:
Etch Baseline Data
Location in Cleanroom