PlasmaTherm720/740 is a dual chamber RIE system with both chlorine and fluorine based chemistry. The PT740 refers to the left chamber.

For training, please contact the Tool Manager(s).

Compatibility:
5 - Class A and B Metals and Compounds
Additional Restrictions
  • Use sapphire carrier wafer for pieces
Manager
Aaron Windsor
Backups:
Jeremy Clark
PT 720/740

The 720/740 is a dual chamber loadlocked system. This is a category 5 tool with few materials restrictions.  

Exposed gold is allowed in this chamber.

Capabilities
  • Chlorine based gases: Cl2, BCl3. Fluorine based : SF6, CF4, CHF3
  • Load locked sample introduction
  • Up to 8 inch wafer capability
  • Turbomolecular pumping
  • exposed gold is allowed in this chamber
Equipment Information Sheet
Resources:
Etch Baseline Data
Location in Cleanroom