PlasmaTherm720/740 is a dual chamber RIE system with both chlorine and fluorine based chemistry. The PT740 refers to the left chamber.
For training, please contact the Tool Manager(s).
- Use sapphire carrier wafer for pieces
The 720/740 is a dual chamber loadlocked system. This is a category 5 tool with few materials restrictions.
Exposed gold is allowed in this chamber.
- Chlorine based gases: Cl2, BCl3. Fluorine based : SF6, CF4, CHF3
- Load locked sample introduction
- Up to 8 inch wafer capability
- Turbomolecular pumping
- exposed gold is allowed in this chamber