Training

For training, please contact the Tool Manager(s).

Training typically takes up to 1 hour.

Additional Restrictions
  • Pieces, 100mm, and 150mm wafers allowed
  • Polymers must be fully cured at least 25C hotter than the deposition temperature
Manager
Backups:
Body

The Arradiance Gemstar-6 ALD system is a benchtop system capable of depositing highly conformal and uniform dielectric and metal thin films. The films are deposited with thermal ALD processes.

Capabilities

The Arradiance Gemstar-6 ALD system is a benchtop system capable of depositing highly conformal and uniform dielectric and metal thin films. The films are deposited with thermal ALD processes.

Processes Available
  • Thermal Al2O3
  • Thermal TiO2
  • Thermal HfO2
  • Thermal ZrO2
  • Thermal Pt
Applications

ALD films are applicable in many areas including advanced microelectronics (transistors), nanophotonics, MEMS, and catalytic applications to name just a few.