CHA Mark 50 E-beam Evaporator
Tool Location
110

For training, please contact the Tool Manager(s).

Compatibility:
5 - Class A and B Metals and Compounds
Additional Restrictions
  • No High vapor pressure materials (Pb, Ca, Zn, Sn, etc.) on substrates or sources in the evaporator.
  • Only evaporate approved materials. Do Not evaporate sources materials not on the data sheet.
  • No oxide evaporation will be done in this tool.
Manager
Aaron Windsor
Backups:
Christopher Alpha
CHA Mark 50
Equipment Information Sheet