CVC SC4500 E-gun Evaporation System for deposition of thin films

Web-based training in CULearn: RSRCH - CNF - Odd/Even Hour Evaporator Training

Additional Restrictions

This cryopumped evaporator contains a 6 pocket electron gun source. The rotation pocket ensures that all evaporations occur from the same point leading to accurate lift-off patterning. Source materials include a variety of metals, semiconductors, as well as silicon dioxide & alumina. Pump down times are generally in the 30 - 45 minute range with total processing time under 2 hours

NOTE: CNF will no longer be supplying crucibles for use in Aluminum e-gun evaporations. The user community has not shown careful use of these crucibles and as a result will need to buy or supply their own. Please contact Aaron BEFORE you need one for details.

Carbon $60 Inter-metallic $200

  • Cryopumped
  • 6 pocket e-gun, 10 KW
  • Optimized for lift off
  • Variable Tilt stage for angled evaporation