Skip to main navigation
Home

Main navigation

  • LIMS/CORAL
  • Tools
  • Training
  • Policies
  • News & Notices
  • REU
  • Staff

External Menu

  • CNF Main
  • COVID Policies
  • Lab Manual
  • MSDS
  • Computing
  • Seabird Web Reservations
  • Tools/Materials Compatibility

Class II Resist Spinners (SU-8)

Equipment Menu

  • Photolithography
  • Electron-Beam Lithography
  • Furnace Processing
  • Electrical Testing
  • Metrology
  • SEMS & Microscopes
  • Etching
  • Thin Film Deposition
  • Packaging & Misc Processing
  • Facilities
  • CM3FP - 3D Prototyping
  • CVIP - 3D Imaging
Training

For training, please contact the Tool Manager(s).

Compatibility:
5 - Class A and B Metals and Compounds
Additional Restrictions
  • NO WATER, acetone, isopropanol, or methanol in spinners
  • NO unapproved resists, solvents, or materials in spinners (see posted list of allowable materials)
Manager
Edward Camacho
Backups:
Tom Pennell
Equipment Information Sheet

Please acknowledge the CNF in your presentations, posters, and publications.

This material is based upon work supported by the National Science Foundation under Grant No. NNCI-2025233. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.

Information on web accessibility.

Cornell University Logo
NSF Logo
NNCI Logo
NYS DSTI Logo