Optical Measurement Systems for transparent thin film measurement

Training for the FilMetrics systems is done with a training video available in CULearn as course RSRCH - CNF - FilMetrics Film Measurement. Once you have watched the entire video you are authorized to use the FilMetrics tools.

Additional Restrictions

The F40 system is attached to a microscope for film thickness measurement from 20 nm to 20 microns with a measurement spot size ranging from 100 to 10 microns square. The use of the microscope allows you to make measurements on specific features of your pattern devices.

 A film model must be available that gives the n & k of the film over the optical wavelength range of the tool (200 - 850 nm doe the F40). For new films, the Woollam Spectroscopic Ellipsometer can give a thorough analysis and generate the required data so that the faster FilMetrics can be used for thickness mapping and other measurements.