- Wavelength range: 400 - 850 nm
- Thickness measurement range: 20 nm - 40 µm
- Microscope mounted.
- Single point measurement.
- Up to 150 mm wafer size.
- Wavelength range: 380 - 1050 nm
- Thickness measurement range: 20 nm - 70 µm
- Wafer mapping capability on up to a 200 mm substrate.
- Located in the Photolithography suite.
- Yellow light filter for measrement of UV sensitive films.
- Wavelength range: 190 - 1100 nm
- Thickness measurement range: 4 nm - 10 µm
- Single point measurement.
- All wafer and piece sizes.
- Wavelength range: 380 - 1700 nm
- Thickness measurement range: 20 nm - 250 µm
- Wafer mapping capability on up to a 200 mm substrate.
