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Suss Backside Alignment Measurement

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SubTitle
Suss Microtech - DSM8
Training

For training, please contact the Tool Manager(s).

Compatibility:
5 - Class A and B Metals and Compounds
Additional Restrictions
  • Adhesives are not allowed (scotch tape, Kapton tape, glues,
  • epoxies, greases, etc are not allowed) in the chamber. Only use clips to secure substrates.
Manager
Garry Bordonaro
Suss DSM8 Backside Alignment Measurement
Equipment Information Sheet

Please acknowledge the CNF in your presentations, posters, and publications.

This material is based upon work supported by the National Science Foundation under Grant No. NNCI-2025233. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.

Information on web accessibility.

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