Resist Spinners

Tool access requirements

General photolithography training, online and in-person, is required to use this tool.

General photolithography training

For the online part of general photolithography training, use Workday Learning:

  • RSRCH - CNF - General Photolithography Overview Video Training

Additionally, find required and recommended reading here:

For in-person general photolithography training, contact:

Giovanni Sartorello

Garry Bordonaro

Compatibility:
5 - Class A and B Metals and Compounds
Additional Restrictions
Manager
Garry Bordonaro
Backups:
Giovanni Sartorello
Resist Spinner

The CNF has three manual resist spinners in the Photolithography preparation room. The spinners are segregated according to material compatibility.  Chucks are available for wafer sizes from 2" to 200mm, and for various size pieces.

Equipment Information Sheet
Resources:
General Photolith Information
Resist Process Information