Resist Spinners

Web-based Training. Sign up for: RSRCH - CNF - General Photolithography Training Video

Compatibility:
5 - Class A and B Metals and Compounds
Additional Restrictions
Manager
Garry Bordonaro
Backups:
Giovanni Sartorello
Resist Spinner

The CNF has three manual resist spinners in the Photolithography preparation room. The spinners are segregated according to material compatibility.  Chucks are available for wafer sizes from 2" to 200mm, and for various size pieces.

Equipment Information Sheet
Resources:
General Photolith Information
Resist Process Information