Class 1 Photolithography Hot Plates

Tool access requirements

General photolithography training, online and in-person, is required to use this tool.

For the online part of general photolithography training, use Workday Learning:

Additionally, find required and recommended reading here:

For in-person general photolithography training, contact:

Compatibility:

Additional Restrictions

Class 1 materials only (most positive resist, nLOF, i-line and DUV materials, P-20 primer).
The backside of all substrates must be inspected and cleaned prior to baking.
No low temperature materials.

Manager

Backups:

Hot plates for baking substrates with Class 1 materials.

Processes Available

EMS vacuum hot plates are used for typical processing, while proximity hot plates are available for DUV and critical processes.
Typical temperatures range from 90°C to 205°C.
Proximity gaps are programmable, but are typically 160 μm.