Training
Tool access requirements
General photolithography training, online and in-person, is required to use this tool.
General photolithography training
For the online part of general photolithography training, use Workday Learning:
- RSRCH - CNF - General Photolithography Overview Video Training
Additionally, find required and recommended reading here:
For in-person general photolithography training, contact:
Compatibility:
Additional Restrictions
- Class 2 materials only (SU-8, LOR, PGMI, LOL, KMPR, OmniCoat, Polyimide).
- The backside of all substrates must be inspected and cleaned prior to baking.
Manager
Backups:
Body
Hot plates for baking substrates with Class 2 materials.
Processes Available
Hot plates have been grouped and labeled to accommodate both users with long and short bake processes
- Three numbered Fairweather hot plates can be reserved for extended (more than two-hour) bake processes.
- The remaining hot plates are available without reservations.