Training

Tool access requirements

General photolithography training, online and in-person, is required to use this tool.

General photolithography training

For the online part of general photolithography training, use Workday Learning:

  • RSRCH - CNF - General Photolithography Overview Video Training

Additionally, find required and recommended reading here:

For in-person general photolithography training, contact:

Sherri Ellis

Giovanni Sartorello

Garry Bordonaro

Additional Restrictions
  • Class 2 materials only (SU-8, LOR, PGMI, LOL, KMPR, OmniCoat, Polyimide).
  • The backside of all substrates must be inspected and cleaned prior to baking.
Backups:
Body

Hot plates for baking substrates with Class 2 materials.

Processes Available

Hot plates have been grouped and labeled to accommodate both users with long and short bake processes

  • Three numbered Fairweather hot plates can be reserved for extended (more than two-hour) bake processes.
  • The remaining hot plates are available without reservations.