Training for first time use of the room is required. Contact the tool manager(s). Please adhere to the instructions on the Equipment Information Sheet.
- Class 2 resists only (see sign on spinner hood)
7 hotplates are available for baking SU-8-coated substrates in the SU-8 lithography area (clean room 106).
Hot plates have been grouped and labeled to accommodate both users with long and short bake processes
- 3 Fairweather hotplates can be reserved for extended (more than 2 hrs) bake processes
- 3 EMI hotplates are available without reservations for shorted bake processes.
- 2 EMI hotplates are available without reservations for bake processes with intermediate times (less than 2 hours)