Hotplates for baking SU-8-coated wafers

Training for first time use of the room is required. Contact the tool manager(s). Please adhere to the instructions on the Equipment Information Sheet.

Compatibility:
5 - Class A and B Metals and Compounds
Additional Restrictions
  • Class 2 resists only (see sign on spinner hood)
Manager
Tom Pennell
Class 2 Hot Plates

7 hotplates are available for baking SU-8-coated substrates in the SU-8 lithography area (clean room 106).

Processes Available

Hot plates have been grouped and labeled to accommodate both users with long and short bake processes

  • 3 Fairweather hotplates can be reserved for extended (more than 2 hrs) bake processes
  • 3 EMI hotplates are available without reservations for shorted bake processes.
  • 2 EMI hotplates are available without reservations for bake processes with intermediate times (less than 2 hours)
Equipment Information Sheet
Resources:
SU8 Processing Suggestions