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Angstrom-Q

Equipment Menu

  • Photolithography
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Training

The first part will be on PowerPoint followed by a hands-on portion

Compatibility:
2 - Silicon Based Substrates and Select Refractory Metals
Additional Restrictions
  • III-V Compound Semiconductor Allowed
Manager
Aaron Windsor
Backups:
Shilling Du
Body

This tool was designed for the deposition and oxidation of thin films to create Josephson Junctions.

Equipment Information Sheet

Please acknowledge the CNF in your presentations, posters, and publications.

This material is based upon work supported by the National Science Foundation under Grant No. NNCI-2025233. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.

Information on web accessibility.

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