SubTitle
Anatech Plasma Asher
Training
Web-based training in CULearn: RSRCH - CNF - Anatech Plasma Asher Training
Compatibility:
Additional Restrictions
- Silicon wafers, III-V wafers, glass, and ceramic only
- No plastic or metal
- No Cadmium, no Zinc
Manager
Backups:
Body
The Anatech USA, model SCE-110-RF, Oxygen plasma Asher is a 10 inch diameter all quartz barrel asher. It is ICP powered 13.56 MHz up to 1000 Watts. It is equipped for both oxygen and nitrogen plasma.
Capabilities
The touch screen controller is configured to run up to 3 step processes, and the first step can be programmed to terminate at a temperature set point on a chamber probe.
Applications
Typically wafer descum after developing resist, and stripping resist after an etch.