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CMOS P+ Polysilicon - D4

Equipment Menu

  • Photolithography
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Training

For training, please contact the Tool Manager(s).

Compatibility:
1 - Restricted Silicon Based Materials Only
Additional Restrictions
  • MOS CLEAN required prior to use
  • Only use desginated MOS holders, wands and tweezers
Manager
Phil Infante
Backups:
Aaron Windsor
Furnace Bank D
Equipment Information Sheet

Please acknowledge the CNF in your presentations, posters, and publications.

This material is based upon work supported by the National Science Foundation under Grant No. NNCI-2025233. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.

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