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Category 3 MOS Clean Bench & Tanks

Equipment Menu

  • Photolithography
  • Electron-Beam Lithography
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Training

For training, please contact the Tool Manager(s).

Compatibility:
3 - Silicon, III-V Compound Semiconductor, Glass and Metal Category
Additional Restrictions
    Manager
    Phil Infante
    Backups:
    Aaron Windsor
    Equipment Information Sheet

    Please acknowledge the CNF in your presentations, posters, and publications.

    This material is based upon work supported by the National Science Foundation under Grant No. NNCI-2025233. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.

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