First Nano Carbon Nanotube and Graphene Furnace

For training, please contact the Tool Manager(s).

Compatibility:
5 - Class A and B Metals and Compounds
Additional Restrictions
Manager
Phil Infante
Backups:
Aaron Windsor
CNT Furnace

Used to grow graphene on samples up to 4" in diameter

Capabilities
  • Carbon Nanotube Growth
  • Graphene Growth
  • Hydrogen Annealing up to 1000 C
  • Vacuum Annealing up to 1000 C
  • Samples up to 100mm diameter
Equipment Information Sheet
Resources:
Location in Cleanroom